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Portable sf6 mix recycling in Kiribati

Portable sf6 mix recycling in Kiribati

iso sf6 mix servi 231 os in Kiribati. Gas 3 for PM3 (strip) and Gas 4 for PM2 (etch) is a pre-mix of 4% H2 in Helium for passivation treatment Gas 5 for PM2 (etch) is a pre-mix of 0.1% +/- 0.005% O2 in Ar for stop on barrier etch (Rev 5) Add 50sccm SF6 MFC (UNIT) for Gas 3 in PM1 Chambers: ICP Cl2 / CFxHy etch chamber (primary etch chamber) ICP low-voltage Ar mill "SOM"

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