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Get PriceSulfur Hexafluoride (SF6) is more and more used for the manufacturing of semiconductor devices such as IC (integrated circuits), flat panels, photovoltaic panels and MEMS (Micro-Electro-Mechanical-Systems). SF6 is applied in the above process as an etching gas. Due to the density and large molecule size, SF6 is a
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Get Price24/08/2017Buildings containing SF6-filled indoor equipment should be provided with ventilation; natural ventilation would normally be adequate to prevent the accumulation of SF6 released due to leakage (see IEC 61634, sub-clause 3.4: "Safety of personnel" and IEC 61936-1). Type and extent of required measures depend upon location of the room, the accessibility, and the ratio of gas to room volume.
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Get Priceour company SF 6 gas handling Zero emissions and maximum gas re-use. SF 6 is a non-toxic, inert insulating and quenching gas of high dielectric strength and thermal stability. Due to its first-class properties it is used in enclosed medium and high voltage switchgear as an arc quenching and insulating gas.
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