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High-precision sf6 mix Handling in Belize

High-precision sf6 mix Handling in Belize

new type sf6 mix sensor in BelizeInductively coupled plasma (ICP) etching of GaN with high selectivity over Al. 22 Ga. 78 N in BCl 3 /SF 6 mixtures has been studied. Selectivity and surface morphology were investigated over a wide range of pressures (3.75 37.5mTorr), RF powers (30 120 W), ICP powers (100 400 W), and SF 6 /BCl 3 ratios (0.1 0.7).

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