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gasbanor sf6 n2 safety precautions in El Salvador

gasbanor sf6 n2 safety precautions in El Salvador

Gas 2: N2, 0-500sccm Gas 3: He, 0-500sccm PM4: DI Water Rinse module Gas 3 for PM3 (strip) and Gas 4 for PM2 (etch) is a pre-mix of 4% H2 in Helium for passivation treatment Gas 5 for PM2 (etch) is a pre-mix of 0.1% +/- 0.005% O2 in Ar for stop on barrier etch (Rev 5) Add 50sccm SF6 MFC (UNIT) for Gas 3 in PM1 Chambers:

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  • how much sf6 n2 Evacuation in Spain

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